A strong reduction in the density of near-interface traps at the SiO2/4H-SiC interface by sodium enhanced oxidation
Journal article, 2007

Author

Fredrik Allerstam

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Halldor Olafsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Gudjon Gudjonsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Dimitar Milkov Dochev

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Einar Sveinbjörnsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Thomas Rödle

Journal of Applied Physics

0021-8979 (ISSN) 1089-7550 (eISSN)

Vol. 101 124502-

Subject Categories

Condensed Matter Physics

More information

Created

10/7/2017