A strong reduction in the density of near-interface traps at the SiO2/4H-SiC interface by sodium enhanced oxidation
Journal article, 2007
Author
Fredrik Allerstam
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Halldor Olafsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Gudjon Gudjonsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Dimitar Milkov Dochev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Einar Sveinbjörnsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Thomas Rödle
Hendrikus Jos
Journal of Applied Physics
0021-8979 (ISSN) 1089-7550 (eISSN)
Vol. 101 124502-Subject Categories
Condensed Matter Physics