Sodium Enhanced Oxidation of Si-face 4H-SiC: a Method to Remove Near Interface Traps
Paper in proceeding, 2007

Author

Einar Sveinbjörnsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Fredrik Allerstam

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Halldor Olafsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Gudjon Gudjonsson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Dimitar Milkov Dochev

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Thomas Rödle

Materials Science Forum

0255-5476 (ISSN) 16629752 (eISSN)

Vol. 556-557 487-492
0878494421 (ISBN)

Subject Categories

Condensed Matter Physics

DOI

10.4028/0-87849-442-1.487

ISBN

0878494421

More information

Latest update

11/23/2021