Sodium Enhanced Oxidation of Si-face 4H-SiC: a Method to Remove Near Interface Traps
Paper in proceeding, 2007
Author
Einar Sveinbjörnsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Fredrik Allerstam
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Halldor Olafsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Gudjon Gudjonsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Dimitar Milkov Dochev
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Thomas Rödle
Hendrikus Jos
Materials Science Forum
0255-5476 (ISSN) 16629752 (eISSN)
Vol. 556-557 487-4920878494421 (ISBN)
Subject Categories
Condensed Matter Physics
DOI
10.4028/0-87849-442-1.487
ISBN
0878494421