Sensors and actuators based on SOI materials
Journal article, 2006

Author

Anke Sanz-Velasco

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Alexandra Nafari

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Henrik Rödjegård

Martin Bring

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Stefan Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Solid-State Electronics

Vol. 50 865-876

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017

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