Test structures for studying flexible interconnect supported by carbon nanotube scaffolds
Paper i proceeding, 2017
Due to their flexibility and compatibility with
silicon devices, the use of carbon nanotubes as scaffolds for metal interconnect in flexible and wearable electronics has been proposed. This paper examines the performance of dual-height carbon nanotubes as flexible scaffolds for horizontal and vertical interconnects. For this purpose, a number of test structures have been designed and fabricated and their electrical and mechanical performance been investigated.