Vertically stacked carbon nanotube-based interconnects for through silicon via application
Journal article, 2015
Stacking of silicon chips with carbon nanotube (CNT)-based through-silicon vias (TSVs) is experimentally demonstrated. Polymer filling is used to improve the transfer quality of CNTs into pre-etched silicon holes. Special hexagonal CNTs are designed to achieve high aspect ratio (10:1) CNT vias. TSVs filled with closely packed CNTs show a highly linear dc I - V response. The proposed process works at room temperature, which makes it compatible with existing device fabrication flow.
transfer
through-silicon via (TSV)
densification
Carbon nanotube (CNT)
interconnect
3D stacking
Author
Di Jiang
Chalmers, Applied Physics, Electronics Material and Systems
Wei Mu
Chalmers, Applied Physics, Electronics Material and Systems
Si Chen
Chalmers, Applied Physics, Electronics Material and Systems
Yifeng Fu
SHT Smart High-Tech
Kjell Jeppson
Chalmers, Applied Physics, Electronics Material and Systems
Johan Liu
Chalmers, Applied Physics, Electronics Material and Systems
IEEE Electron Device Letters
0741-3106 (ISSN) 15580563 (eISSN)
Vol. 36 5 499-501 7064733Carbon Based Smart Systems for Wireless Applications (NANO RF)
European Commission (EC) (EC/FP7/318352), 2012-09-01 -- 2015-08-31.
Areas of Advance
Nanoscience and Nanotechnology
Production
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology
Infrastructure
Nanofabrication Laboratory
DOI
10.1109/LED.2015.2415198