Chalmers University of Technology
Whole organizationShowing 17 publications
MEMS Sensor for In Situ TEM Atomic Force Microscopy
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
MEMS sensor for in situ TEM Atomic Force Microscopy
A Micromachined 94 GHz Dielectric Resonator Antenna for Focal Plane Array Applications
Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
Replication of continuous-profiled micro-optical elements for silicon integration
2D laser beamsteering by integration of MEMS and diffractive optics
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