Bengt Nilsson

Principal Research Engineer at Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

MMIC processing

Source: chalmers.se

Showing 48 publications

2017

Cryogenic LNAs for SKA band 2 to 5

Joel Schleeh, Giuseppe Moschetti, Niklas Wadefalk et al
IEEE MTT-S International Microwave Symposium Digest, p. 164-167
Paper in proceedings
2016

Estimating the optimum dose for arbitrary substrate materials based on Monte Carlo simulated point spread functions

Marcus Rommel, Bengt Nilsson
Microelectronic Engineering. Vol. 155 (SI), p. 29-32
Journal article
2016

Cryogenic low-noise InP HEMTs: A source-drain distance study

Eunjung Cha, Arsalan Pourkabirian, Joel Schleeh et al
2016 Compound Semiconductor Week, CSW 2016, p. Article number 7528576-
Paper in proceedings
2015

Cryogenic Low Noise Amplifiers in an InP HEMT MMIC Process

Per-Åke Nilsson, Arsalan Pourkabirian, Joel Schleeh et al
Asia-Pacific Microwave Conference, APMC 2015, Nanjing, China, 6-9 December 2015. Vol. 1, p. Art. no. 7411746-
Paper in proceedings
2014

An InP MMIC process optimized for low noise at Cryo

Per-Åke Nilsson, Joel Schleeh, Niklas Wadefalk et al
Technical Digest - IEEE Compound Semiconductor Integrated Circuit Symposium, CSIC
Paper in proceedings
2013

Sub-10 nm resolution after lift-off using HSQ./PMMA double layer resist

Marcus Rommel, Bengt Nilsson, Piotr Jedrasik et al
Microelectronic Engineering. Vol. 110, p. 123-125
Journal article
2012

Cryogenic 0.5-13 GHz low noise amplifier with 3 K mid-band noise temperature

Joel Schleeh, Niklas Wadefalk, Per-Åke Nilsson et al
IEEE MTT-S International Microwave Symposium Digest
Paper in proceedings
2012

Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

V. Passi, Ulf Södervall, Bengt Nilsson et al
Microelectronic Engineering. Vol. 95, p. 83-89
Journal article
2012

Ultralow-Power Cryogenic InP HEMT With Minimum Noise Temperature of 1 K at 6 GHz

Joel Schleeh, Göran Alestig, John Halonen et al
IEEE Electron Device Letters. Vol. 33 (5), p. 664-666
Journal article
2012

High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires

V. Passi, U. Bhaskar, T. Pardoen et al
Journal of Microelectromechanical Systems. Vol. 21 (4), p. 822-829
Journal article
2011

Microscopic Si whiskers

S. Kalem, P. Werner, Mats Hagberg et al
Microelectronic Engineering. Vol. 88 (8), p. 2593-2596
Journal article
2011

Realization of spectrally engineered semiconductor Fabry-Perot lasers with narrow geometrical tolerances

Göran Adolfsson, Jörgen Bengtsson, Åsa Haglund et al
Journal of Applied Physics. Vol. 109 (9), p. 093112-
Journal article
2011

On-chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams

U. Bhaskar, V. Passi, Ulf Södervall et al
Advanced Materials Research. Vol. 276, p. 117-126
Journal article
2011

Molecular junctions made of tungsten-polyoxometalate self-assembled monolayers: Towards polyoxometalate-based molecular electronics devices

D. Velessiotis, A. M. Douvas, S. Athanasiou et al
Microelectronic Engineering. Vol. 88 (8), p. 2775-2777
Journal article
2011

Experimental evaluation method of point spread functions used for proximity effects correction in electron beam lithography

Bengt Nilsson
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. Vol. 29 (6)
Journal article
2011

Controlled thinning and surface smoothening of silicon nanopillars

S. Kalem, P. Werner, Bengt Nilsson et al
Nanotechnology. Vol. 20 (44), p. 445303-
Journal article
2011

Passivation of InGaAs/InAlAs/InP HEMTs using Al2O3 atomic layer deposition

Joel Schleeh, John Halonen, Bengt Nilsson et al
Conference Proceedings - International Conference on Indium Phosphide and Related Materials. 2011 Compound Semiconductor Week and 23rd International Conference on Indium Phosphide and Related Materials, CSW/IPRM 2011, Berlin, 22-26 May 2011
Paper in proceedings
2011

Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale

V. Passi, U. Bhaskar, T. Pardoen et al
Review of Scientific Instruments. Vol. 82 (11), p. art. no 116106-
Journal article
2011

Black silicon with high density and high aspect ratio nanowhiskers

S. Kalem, P. Werner, Örjan Arthursson et al
Nanotechnology. Vol. 22 (23)
Journal article
2007

Field-effect transistors with thin ZnO as active layer for gas sensor applications

F. V. Farmakis, T. Speliotis, K. P. Alexandrou et al
Microelectronic Engineering. Vol. 85 (5-6), p. 1035-1038
Paper in proceedings
2007

Second order effects of aspect ratio variations in high sensitivity grating couplers

N Darwish, L. Dieguez, M. Moreno et al
Microelectronic Engineering. Vol. 84 (5-8), p. 1896-2011
Journal article
2003

Dual pass electron beam writing of bit arrays with sub-100 nm bits on imprint lithography masters for patterned media production

Alex Bogdanov, Tommy Holmqvist, Piotr Jedrasik et al
Microelectronic Engineering. Vol. 67-68, p. 381-389
Paper in proceedings
2002

Magnetic domain structures in submicron-size particles of epitaxial Fe (001) films: shape anisotropy and thickness dependence

Maj Hanson, O. Kazakova, P. Blomqvist et al
Physical Review B. Vol. 66, p. 144419-1
Journal article
2001

Magnetic properties of epitaxial Ni(001) films and sub-micron particles

Maj Hanson, C. Johansson, Bengt Nilsson et al
Journal of Magnetism and Magnetic Materials. Vol. 236, p. 139-50
Journal article
2001

Morphology of InGaAs/GaAs quantum wires prepared by highly controlled deep-etching techniques

Otto Zsebök, Jan Thordson, Bengt Nilsson et al
Nanotechnology. Vol. 12, p. 32-7
Journal article
2000

Paramagnetic Meissner response of an artificially granular YBCO thin film

M. R. Koblischka, L. Pust, N. Chikumoto et al
Physica B: Condensed Matter. Vol. 284-288, p. 599-600
Paper in proceedings
2000

Application of calixarene for nanometer magnetic particle fabrication

Piotr Jedrasik, Maj Hanson, Bengt Nilsson
Microelectronic Engineering. Vol. 53, p. 497-500
Paper in proceedings
2000

Fabrication and transport measurements of YBa2Cu3O7−x nanostructures

Peter Larsson, Bengt Nilsson, Zdravko Ivanov
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. Vol. 18 (1), p. 1825-31
Journal article
2000

Microscopic spectrophotometry applied to quasifractal gold particle clusters

J. Jonsson, J. Sotelo, G. A. Niklasson et al
Proceedings of the SPIE - The International Society for Optical Engineering. Vol. 4103, p. 98-105
Conference contribution
2000

Flux distributions of an artificially granular YBa2Cu3O7- thin film observed using magneto-optic imaging

M. R. Koblischka, L. Pust, T. H. Johansen et al
Physica C: Superconductivity and its Applications. Vol. 331, p. 113-26
Journal article
1999

Magnetic properties of two-dimensional arrays of epitaxial Fe (001) submicron particles

Maj Hanson, Christer Johansson, Bengt Nilsson et al
Journal of Applied Physics. Vol. 85 (5), p. 2793-2799
Journal article
1999

Magneto-optic imaging of flux penetration into an artificially granular high-Tc superconductor

M. R. Koblischka, L. Pust, P. Nalevka et al
Advances in Superconductivity XI. Proceedings of the 11th International Symposium on Superconductivity (ISS'98). Vol. 2, p. 693-696
Conference contribution
1999

Flux penetration into an artificially granular high-Tc superconductor

M. R. Koblishka, L. Pust, A. Galkin et al
Physical Review B. Vol. 59, p. 12114-20
Journal article
1996

Effect of non-classical current paths in networks of 1-dimensional wires

P. M. Echternach, A. G. Mikhalchuk, H. M. Bozler et al
Czechoslovak Journal of Physics
Conference contribution
1996

High speed components based on high-Tc superconducting grain boundary junctions

Tord Claeson, Zdravko Ivanov, V. Kaplunenko et al
1996 International Workshop on Superconductivity. `High Temperature Superconducting Electronics: Fundamentals and Applications. Program and Extended Abstracts, p. 3-6
Conference contribution
1995

Manufacturing of nanometer structures in YBa2Cu3O7 thin films using a carbon based multilayer mask

Peter Larsson, Bengt Nilsson, Huai-ren Yi et al
Applied Superconductivity 1995. Proceedings of EUCAS 1995, the Second European Conference on Applied Superconductivity. Vol. 2, p. 935-938
Paper in proceedings
1995

Quantum effects in the resistivity of percolation metal networks

M. E. Gershenson, P. M. Echternach, H. M. Bozler et al
Physical Review Letters. Vol. 74, p. 446-9
Journal article
1995

High-Tc voltage amplifier based on single flux quantum processing and operating up to 77 K

V. Kaplunenko, Huai-ren Yi, Bengt Nilsson et al
Applied Superconductivity 1995. Proceedings of EUCAS 1995, the Second European Conference on Applied Superconductivity. Vol. 2, p. 1657-1660
Paper in proceedings
1995

Nonlocal effects in the resistance of one-dimensional wires with dangling side branches

M. E. Gershenson, P. M. Echtemach, A. G. Mikhalchuk et al
Physical Review B. Vol. 51, p. 10256-9
Journal article
1994

Fabrication of arrays of nanometer size test structures for scanning probe microscope tips characterization

A. L. Bogdanov, D. Erts, Bengt Nilsson et al
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. Vol. 12 (6), p. 3681-3684
Paper in proceedings
1994

Quantum interference effects in percolated metal networks

M. E. Gershenson, P. M. Echternach, H. M. Bozler et al
Physica B: Condensed Matter, p. 1109-1110
Paper in proceedings
1991

Good selectivity between a NiCr mask and GaAs and AlGaAs by chemically assisted ion beam etching with Cl2 gas

Zhaohua Xiao, Bengt Nilsson
Journal of the Electrochemical Society. Vol. 138, p. 3086-9
Journal article
1991

Electric field effects and screening in mesoscopic bismuth wires

V. T. Petrashov, V. N. Antonov, Bengt Nilsson
Journal of Physics Condensed Matter. Vol. 3 (Copyright 1992, IEE), p. 9705-11
Journal article
1990

Multilevel phase holograms manufactured by electron-beam lithography

Mats Ekberg, J. Michael Larsson, Sverker Hård et al
Optics Letters. Vol. 15, p. 568-569
Journal article
1990

Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2

Zhaohua Xiao, Bengt Nilsson, P. Svedberg
Journal of the Electrochemical Society. Vol. 137, p. 1579-1581
Journal article
1987

Resistance in sub-m size GaAs lines

A. Rouhani-Kalleh, Thorvald Andersson, Bengt Nilsson et al
Superlattices and Microstructures. Vol. 3 (4), p. 417-419
Journal article
1986

A sub-mm wave quasiparticle receiver for 750 GHz-progress report

Dag Winkler, W. R. McGrath, Bengt Nilsson et al
Proceedings of the SPIE - The International Society for Optical Engineering. Vol. 598, p. 33-38
Paper in proceedings
1986

On the feasibility of constructing an imaging array of slot-antennas integrated with SIS mixers

Dag Winkler, W. R. McGrath, Bengt Nilsson et al
Proceedings of an ESA Workshop on a Space-Borne Sub-Millimetre Astronomy Mission, p. 277-283
Paper in proceedings

Save references

If you have installed Zotero or Mendeley on your computer you can use a plugin to extract references from the publications you see.

Download plugins:
Zotero
Mendeley

There are no projects.
There might be more projects where Bengt Nilsson participates, but you have to be logged in as a Chalmers employee to see them.