Visar 115 publikationer
Farzan Alavian Ghavanini, Peter Enoksson, Stefan Bengtsson et al
Journal of Applied Physics. Vol. 110 (2)
Artikel i vetenskaplig tidskrift
2011
Stefan Bengtsson, Peter Enoksson, Farzan Alavian Ghavanini et al
International Journal of High Speed Electronics and Systems. Vol. 20 (1), p. 195-204
Artikel i vetenskaplig tidskrift
2010
Stefan Bengtsson
ECS Transactions. Vol. 33 (4), p. 429-439
Paper i proceeding
2009
Stefan Bengtsson, Eleanor E B Campbell, J Ek-Weis et al
Advanced workshop on Frontiers in Electronics (invited paper)
Paper i proceeding
2008
Mahdi Yousif, Farzan Alavian Ghavanini, Per Lundgren et al
Nanotechnology. Vol. 19 (28) (285204)
Artikel i vetenskaplig tidskrift
2008
Farzan Alavian Ghavanini, Mahdi Yousif, Per Lundgren et al
Nanotechnology
Artikel i vetenskaplig tidskrift
2007
T.M Chung, B Olbrechts, Ulf Södervall et al
Solid State Electronics. Vol. 51 (2), p. 231-238
Artikel i vetenskaplig tidskrift
2006
E Marx, M Chisea, Malin Borg et al
Applied Physics Letters. Vol. 88 (14), p. 143107-
Artikel i vetenskaplig tidskrift
2006
Mohammad Kabir, Raluca Elena Morjan, Oleg Nerushev et al
Nanotechnology. Vol. 17 (3), p. 790-794
Artikel i vetenskaplig tidskrift
2006
Anke Sanz-Velasco, Alexandra Nafari, Henrik Rödjegård et al
Solid-State Electronics. Vol. 50, p. 865-876
Artikel i vetenskaplig tidskrift
2005
Mohammad Kabir, Raluca Elena Morjan, Krister Svensson et al
NSTI conference, Anaheim, California
Konferensbidrag (offentliggjort, men ej förlagsutgivet)
2005
Johan Piscator, Alexandra Nafari, Martin Bring et al
EUROSOI-2005
Paper i proceeding
2005
Jonas Berg, Per Lundgren, Peter Enoksson et al
Applied Physics Letters. Vol. 87 (21), p. 223107-
Artikel i vetenskaplig tidskrift
2005
Mohammad Kabir, Raluca Elena Morjan, Oleg Nerushev et al
Nanotechnology. Vol. 16 (4), p. 458-466
Artikel i vetenskaplig tidskrift
2005
Jonas Berg, Franklin Che, Per Lundgren et al
Nanotechnology. Vol. 16 (10), p. 2197-2202
Artikel i vetenskaplig tidskrift
2005
Peter Enoksson, Cristina Rusu, Anke Sanz-Velasco et al
Proceeding of the 9th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applic, Canadaations, Quebec City
Paper i proceeding
2005
Karl Hobart, Charles Hunt, Helmut Baumgart et al
Samlingsverk (redaktörskap)
2004
Kuntjoro Pinardi, Ulrich Heinle, Stefan Bengtsson et al
IEEE Transactions on Electron Devices. Vol. 51 (5), p. 790-796
Artikel i vetenskaplig tidskrift
2004
Raluca Elena Morjan, Mohammad Kabir, SangWook Lee et al
Current Applied Physics. Vol. 4 (6), p. 591-594
Artikel i vetenskaplig tidskrift
2004
Mikael Johansson, M. Y. A. Yousif, Per Lundgren et al
Physica scripta. Topical Issues. Vol. T114, p. 97-99
Paper i proceeding
2004
Kuntjoro Pinardi, Ulrich Heinle, Stefan Bengtsson et al
Solid-State Electronics. Vol. 48 (7), p. 1119-1126
Artikel i vetenskaplig tidskrift
2004
Stefan Bengtsson, Petra Amirfeiz, Mikael Johansson
Proc. 19th Symp. on Microelectronics Technology and Devices. Vol. 3, p. 241-
Paper i proceeding
2004
Jonas Berg, Mohammad Kabir, Per Lundgren et al
Physica Scripta. Vol. T114, p. 175-180
Artikel i vetenskaplig tidskrift
2003
Stefan Bengtsson, Helmut Baumgart, Charles Hunt et al
Samlingsverk (redaktörskap)
2003
Petra Amirfeiz, Anke Sanz-Velasco, Stefan Bengtsson
Proceedings of the 7th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, Paris, France (2003)
Paper i proceeding
2003
Petra Amirfeiz, Anke Sanz-Velasco, Stefan Bengtsson
Proc. of the 7th Int. Symp. on Semiconductor Wafer Bonding. Vol. 19, p. 267-
Paper i proceeding
2003
Mikael Johansson, Mahdi Yousif, Per Lundgren et al
Semiconductor Science And Technology. Vol. 18 (9), p. 820-826
Artikel i vetenskaplig tidskrift
2003
M. Y. A. Yousif, Mikael Johansson, Per Lundgren et al
ESSDERC 2003. Proceedings of the 33rd European Solid-State Device Research - ESSDERC '03, p. 255-
Paper i proceeding
2003
Alok Sareen, Y. Wang, Ulf Södervall et al
Journal Of Applied Physics. Vol. 93 (6), p. 3545-3552
Artikel i vetenskaplig tidskrift
2003
Anke Sanz-Velasco, Petra Amirfeiz, Stefan Bengtsson et al
Journal Of The Electrochemical Society. Vol. 150 (2), p. G155-G162
Artikel i vetenskaplig tidskrift
2002
Cindy Colinge, Stefan Bengtsson, Petra Amirfeiz et al
Presented at TMS, Electronics Materials Conference, Santa Barbara, USA
Paper i proceeding
2002
Alok Sareen, A. C. Lindgren, Per Lundgren et al
Solid-State Electronics. Vol. 46 (7), p. 991-995
Artikel i vetenskaplig tidskrift
2002
Kuntjoro Pinardi, Ulrich Heinle, Stefan Bengtsson et al
Physica Scripta. Vol. T101, p. 38-41
Artikel i vetenskaplig tidskrift
2002
Petra Amirfeiz, Anke Sanz-Velasco, Martin Bring et al
Proceedings of the Workshop on wafer bonding, Barcelona, Spain
Paper i proceeding
2002
Mikael Johansson, M. Y. A. Yousif, Alok Sareen et al
ASDAM '02. Conference Proceedings. Fourth International Conference on Advanced Semiconductor Devices and Microsystems, p. 279-
Paper i proceeding
2002
Mikael Johansson, M. Y. A. Yousif, Alok Sareen et al
ESSDERC 2002. Proceedings of the 32nd European Solid-State Device Research Conference, p. 419-
Paper i proceeding
2002
Per Lundgren, Stefan Bengtsson
Proceedings of the 2002 2nd IEEE Conference on Nanotechnology (Cat. No.02TH8630), p. 201-
Paper i proceeding
2002
Kuntjoro Pinardi, Ulrich Heinle, Stefan Bengtsson et al
Solid-State Electronics. Vol. 46 (12), p. 2105-2110
Artikel i vetenskaplig tidskrift
2002
Mikael Johansson, Stefan Bengtsson
Progress in SOI Structures and Devices Operating at Extreme Conditions. Proceedings of the NATO Advanced Research Workshop, p. 333-
Paper i proceeding
2001
Pier Sazio, Jonas Berg, Patrick See et al
MRS Spring Meeting 16-20 April 2001. Vol. 679E, p. B2.3-
Paper i proceeding
2001
Petra Amirfeiz, Stefan Bengtsson, Mats Bergh et al
Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings. Vol. 99, p. 29-39
Paper i proceeding
2001
Stefan Bengtsson
Proc. 6th International Symposium on Semiconductor Wafer Bonding. The Electrochemical Society.. Vol. 2001 (27), p. 205-
Artikel i vetenskaplig tidskrift
2001
Anke Sanz-Velasco, Petra Amirfeiz, Stefan Bengtsson
Proc. 6th International Symposium on Semiconductor Wafer Bonding. The Electrochemical Society.. Vol. 2001 (27), p. 31-40
Artikel i vetenskaplig tidskrift
2001
Neil Greenham, Pier Sazio, Patrick See et al
6th European Conference on Molecular Electronics
Konferensbidrag (offentliggjort, men ej förlagsutgivet)
2001
Helmut Baumgart, Charles Hunt, Stefan Bengtsson et al
Samlingsverk (redaktörskap)
2001
Mikael Johansson, Jonas Berg, Stefan Bengtsson
Solid-State Electronics. Vol. 45 (4), p. 567-573
Artikel i vetenskaplig tidskrift
2001
Jonas Berg, Stefan Bengtsson, Per Lundgren
7th MELARI/NID workshop
Konferensbidrag (offentliggjort, men ej förlagsutgivet)
2001
Mamor Mamor, Ying Fu, Omer Nur et al
Applied Physics A-Materials Science & Processing. Vol. 72 (5), p. 633-637
Artikel i vetenskaplig tidskrift
2001
Anke Weinert, Petra Amirfeiz, Stefan Bengtsson
Sensors And Actuators A-Physical. Vol. 92 (1-3), p. 214-222
Artikel i vetenskaplig tidskrift
2001
Jonas Berg, Stefan Bengtsson, Per Lundgren
MRS Spring Meeting. Vol. 679E, p. B1.6-
Paper i proceeding
2001
Mikael Johansson, Stefan Bengtsson
Semiconductor Wafer Bonding: Science, Technology, And Applications V, Proceedings. Vol. 99, p. 420-428
Paper i proceeding
2000
Jonas Berg, Per Lundgren, Stefan Bengtsson
Solid-State Electronics. Vol. 44 (12), p. 2247-2252
Artikel i vetenskaplig tidskrift
2000
Stefan Bengtsson, Mats Bergh
Perspectives, Science And Technologies For Novel Silicon On Insulator Devices. Vol. 73, p. 97-107
Paper i proceeding
2000
Petra Amirfeiz, Stefan Bengtsson, Mats Bergh et al
Journal Of The Electrochemical Society. Vol. 147 (7), p. 2693-2698
Artikel i vetenskaplig tidskrift
2000
Mikael Johansson, Stefan Bengtsson
Journal Of Applied Physics. Vol. 88 (2), p. 1118-1123
Artikel i vetenskaplig tidskrift
2000
Jonas Berg, Stefan Bengtsson, Jörgen Olsson
GHz 2000, p. 399-402
Poster (konferens)
2000
Stefan Bengtsson, Petra Amirfeiz
Journal Of Electronic Materials. Vol. 29 (7), p. 909-915
Artikel i vetenskaplig tidskrift
2000
Ying Fu, Mamor Mamor, Magnus Willander et al
Applied Physics Letters. Vol. 77 (1), p. 103-105
Artikel i vetenskaplig tidskrift
1999
Stefan Bengtsson, Mats Bergh, Anders Soderbarg et al
conference proceedings:III-V and IV-IV Materials and Processing Challenges for Highly Integrated Microelectronics and Optoelectronics. Symposium., p. 133-
Paper i proceeding
1999
Mikael Johansson, Mats Bergh, Stefan Bengtsson
1999 IEEE International SOI Conference. Proceedings (Cat. No.99CH36345), p. 30-
Paper i proceeding
1998
Karin Hermansson, Francois Grey, Stefan Bengtsson et al
Journal Of The Electrochemical Society. Vol. 145 (5), p. 1645-1649
Artikel i vetenskaplig tidskrift
1998
Einar Sveinbjörnsson, Stefan Bengtsson, J. Weber et al
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications, p. 264-
Paper i proceeding
1998
Stefan Bengtsson
International Conference on Solid-State and Integrated Circuit Technology Proceedings, p. 745-
Paper i proceeding
1998
Per Ericsson, Stefan Bengtsson, Jarmo Skarp et al
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications, p. 576-
Paper i proceeding
1998
Karin Hermansson, Francois Grey, Stefan Bengtsson et al
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications, p. 401-
Paper i proceeding
1998
Anders Jauhiainen, David Westberg, Stefan Bengtsson
Journal Of Applied Physics. Vol. 84 (7), p. 3960-3965
Artikel i vetenskaplig tidskrift
1997
Anders Jauhiainen, Stefan Bengtsson, Olof Engström
Journal Of Applied Physics. Vol. 82 (10), p. 4966-4976
Artikel i vetenskaplig tidskrift
1997
Stefan Bengtsson, Karin Ljungberg
Science and Technology of Semiconductor Surface Preparation. Symposium, p. 267-
Paper i proceeding
1997
Olof Engström, Stefan Bengtsson
Samlingsverk (redaktörskap)
1997
Per Ericsson, Stefan Bengtsson
1997 IEEE International SOI Conference Proceedings (Cat. No.97CH36069), p. 48-
Paper i proceeding
1997
Karin Ljungberg, Francois Grey, Stefan Bengtsson
Applied Surface Science. Vol. 117, p. 813-819
Artikel i vetenskaplig tidskrift
1997
Per Ericsson, Stefan Bengtsson, Jarmo Skarp
Microelectronic Engineering. Vol. 36 (1-4), p. 91-94
Artikel i vetenskaplig tidskrift
1997
Karin Ljungberg, Francois Grey, Stefan Bengtsson
Proc 2nd International Symposium on Control of Semiconductor Interfaces. North-Holland., p. 813-
Paper i proceeding
1997
Per Ericsson, Stefan Bengtsson
Applied Physics Letters. Vol. 71 (16), p. 2310-2312
Artikel i vetenskaplig tidskrift
1996
Karin Ljungberg, Ulf Jansson, Stefan Bengtsson et al
Journal Of The Electrochemical Society. Vol. 143 (5), p. 1709-1714
Artikel i vetenskaplig tidskrift
1996
Stefan Bengtsson, Karin Ljungberg, Jan Vedde
Applied Physics Letters. Vol. 69 (22), p. 3381-3383
Artikel i vetenskaplig tidskrift
1996
Karin Ljungberg, Stefan Bengtsson
Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces. UCPSS '96, p. 123-
Paper i proceeding
1996
Anders Jauhiainen, Stefan Bengtsson, Olof Engström
Diamond for Electronic Applications. Symposium, p. 331-
Paper i proceeding
1996
Bengt Edholm, Anders Soderbarg, Stefan Bengtsson
Journal Of The Electrochemical Society. Vol. 143 (4), p. 1326-1334
Artikel i vetenskaplig tidskrift
1996
Stefan Bengtsson, Mats Bergh, Manolis Choumas et al
Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers. Vol. 35 (8), p. 4175-4181
Artikel i vetenskaplig tidskrift
1996
Per Ericsson, Stefan Bengtsson
Journal Of The Electrochemical Society. Vol. 143 (11), p. 3722-3727
Artikel i vetenskaplig tidskrift
1995
Stefan Bengtsson
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications, p. 221-
Paper i proceeding
1995
V. V. Afanasev, Per Ericsson, Stefan Bengtsson et al
Applied Physics Letters. Vol. 66 (13), p. 1653-1655
Artikel i vetenskaplig tidskrift
1995
Mats Bergh, Stefan Bengtsson, Mats O. Andersson
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications, p. 126-
Paper i proceeding
1995
Per Ericsson, Stefan Bengtsson, Ulf Södervall
Journal Of Applied Physics. Vol. 78 (5), p. 3472-3480
Artikel i vetenskaplig tidskrift
1995
Karin Ljungberg, Ylva Backlund, Anders Soderbarg et al
Journal Of The Electrochemical Society. Vol. 142 (4), p. 1297-1303
Artikel i vetenskaplig tidskrift
1995
Per Ericsson, Stefan Bengtsson
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications, p. 115-
Paper i proceeding
1995
Anders Soderbarg, Bengt Edholm, Stefan Bengtsson
1995 IEEE International SOI Conference Proceedings, p. 104-
Paper i proceeding
1995
Stefan Bengtsson, Per Ericsson, Ulf Södervall et al
Journal Of The Electrochemical Society. Vol. 142 (8), p. 2721-2726
Artikel i vetenskaplig tidskrift
1995
Karin Ljungberg, Ulf Jansson, Anders Soderbarg et al
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications, p. 163-
Paper i proceeding
1994
Stefan Bengtsson, Per Ericsson, K Mitani et al
Proc. 6th International Symposium on Silicon-On-Insulator Technology and Devices. The Electrochemical Society.. Vol. 94 (11), p. 245-
Artikel i vetenskaplig tidskrift
1994
Lars-Åke Ragnarsson, Stefan Bengtsson, Mats O. Andersson et al
Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces (UCPSS '94), p. 117-
Artikel i vetenskaplig tidskrift
1994
Stefan Bengtsson, Manolis Choumas, W. P. Maszara et al
1994 IEEE International SOI Conference Proceedings, p. 35-
Artikel i vetenskaplig tidskrift
1994
Karin Ljungberg, Anders Soderbarg, Stefan Bengtsson et al
Journal Of The Electrochemical Society. Vol. 141 (2), p. 562-566
Artikel i vetenskaplig tidskrift
1994
Per Ericsson, Stefan Bengtsson
Proc. 25th IEEE Semiconductor Interface Specialists Conference. IEEE
Artikel i vetenskaplig tidskrift
1994
Mats Bergh, Mats O. Andersson, Stefan Bengtsson
Proc. 25th IEEE Semiconductor Interface Specialists Conference. IEEE.
Artikel i vetenskaplig tidskrift
1993
Anders Jauhiainen, Stefan Bengtsson, Olof Engström et al
Proc. 3rd International Sympoisum on Diamond Materials. The Electrochemical Society.. Vol. 93 (17), p. 927-
Artikel i vetenskaplig tidskrift
1993
Karin Ljungberg, Anders Söderbärg, Stefan Bengtsson et al
Proc of the 2nd International Symposium on Semiconductor Wafer Bonding. The Electrochemical Society. Vol. 93 (29), p. 473-
Artikel i vetenskaplig tidskrift
1993
Per Ericsson, Stefan Bengtsson
Proc. 24th IEEE Semiconductor Interface Specialists Conference. IEEE.
Artikel i vetenskaplig tidskrift
1992
Anders Jauhiainen, Stefan Bengtsson, Olof Engström
Proc of the 2nd European Solid State Device Research Conference. ESSDERC, p. 597-
Artikel i vetenskaplig tidskrift
1992
Stefan Bengtsson, Anders Jauhiainen, Olof Engström
Journal Of The Electrochemical Society. Vol. 139 (8), p. 2302-2306
Artikel i vetenskaplig tidskrift
1992
Stefan Bengtsson, Anders Jauhiainen, Olof Engström
Proceedings of the First International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, p. 339-
Paper i proceeding
1992
Stefan Bengtsson, G. Andersson, Mats O. Andersson et al
Journal Of Applied Physics. Vol. 72 (1), p. 124-140
Artikel i vetenskaplig tidskrift
1992
Olof Engström, Stefan Bengtsson
Proceedings of the First International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, p. 295-
Paper i proceeding
1992
Olof Engström, Stefan Bengtsson, G. Andersson et al
Journal Of The Electrochemical Society. Vol. 139 (12), p. 3638-3643
Artikel i vetenskaplig tidskrift
1992
Stefan Bengtsson
Journal Of Electronic Materials. Vol. 21 (8), p. 841-862
Artikel i vetenskaplig tidskrift
1992
Anders Jauhiainen, Stefan Bengtsson, Olof Engström
Microelectronic Engineering. Vol. 19 (1-4), p. 597-600
Artikel i vetenskaplig tidskrift
1991
Stefan Bengtsson
Doktorsavhandling
1991
Stefan Bengtsson, Olof Engström
Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers. Vol. 30 (2), p. 356-361
Artikel i vetenskaplig tidskrift
1990
Stefan Bengtsson, Olof Engström
Journal Of The Electrochemical Society. Vol. 137 (7), p. 2297-2303
Artikel i vetenskaplig tidskrift
1990
Stefan Bengtsson, Olof Engström
1990 IEEE SOS/SOI Technology Conference., p. 77-
Artikel i vetenskaplig tidskrift
1990
Stefan Bengtsson, Olof Engström
ESSDERC 90. 20th European Solid State Device Research Conference, p. 1-
Paper i proceeding
1989
Stefan Bengtsson, Olof Engström
Journal Of Applied Physics. Vol. 66 (3), p. 1231-1239
Artikel i vetenskaplig tidskrift
1989
Stefan Bengtsson, Olof Engström
ESSDERC '89. 19th European Solid State Devices Research Conference, p. 353-
Paper i proceeding
1988
Stefan Bengtsson, Olof Engström
Journal De Physique. Vol. 49 (C-4), p. 63-66
Artikel i vetenskaplig tidskrift